Solid-state imaging device having through electrode provided therein and electronic apparatus incorporating the solid-state imaging device

ABSTRACT

There is provided a solid-state imaging device including: one or more photoelectric conversion elements provided on side of a first surface of a semiconductor substrate; a through electrode coupled to the one or more photoelectric conversion elements, and provided between the first surface and a second surface of the semiconductor substrate; and an amplifier transistor and a floating diffusion provided on the second surface of the semiconductor substrate, in which the one or more photoelectric conversion elements are coupled to a gate of the amplifier transistor and the floating diffusion via the through electrode.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/698,756, filed Nov. 27, 2019, which is a continuation of U.S. patentapplication Ser. No. 15/619,077, filed Jun. 9, 2017, now U.S. Pat. No.10,529,765, which is a continuation of U.S. patent application Ser. No.14/911,538, filed Feb. 11, 2016, now U.S. Pat. No. 9,698,188, whichclaims the benefit of PCT Application No. PCT/JP2014/070842 having aninternational filing date of Aug. 7, 2014, which designated the UnitedStates, which PCT application claims the benefit of Japanese PriorityPatent Application JP 2013-169553 filed Aug. 19, 2013, the entiredisclosures of which are hereby incorporated herein by reference.

TECHNICAL FIELD

The disclosure relates to a solid-state imaging device suitable for aso-called longitudinal stereoscopic type, and an electronic apparatusincluding the solid-state imaging device.

BACKGROUND ART

CMOS (Complementary Metal-Oxide Semiconductor) image sensors mayexemplify solid-state imaging devices installed in digital videocameras, digital still cameras, smartphones, mobile phones, etc. In CMOSimage sensors, photoelectric charges are accumulated in pn junctioncapacitance of photodiodes that serve as photoelectric conversionelements; the photoelectric charges thus accumulated are read outthrough MOS transistors.

Existing solid-state imaging units generally use a pixel array in whichred, green, and blue pixels are arranged on a plane, which causes afalse color associated with generation of a color signal by execution ofinterpolation between pixels. Hence, a study has been made of alongitudinal spectroscopic type solid-state imaging device in which red,green, and blue photoelectric conversion regions are stacked along alongitudinal direction of a same pixel. For example, in PatentLiterature 1, there is disclosed a solid-state imaging device in whichphotodiodes of blue and red are stacked in a semiconductor substrate anda green photoelectric conversion element using an organic photoelectricconversion film is provided on light receiving surface side (rearsurface side or first surface side) of the semiconductor substrate.

CITATION LIST Patent Literature

Patent Literature 1: Japanese Unexamined Patent Application PublicationNo. 2011-29337

SUMMARY OF INVENTION

Patent Literature 1 describes that charges generated in the greenphotoelectric conversion element are accumulated in an n-typesemiconductor region on wiring layer side (front surface side or secondsurface side) of the semiconductor substrate via a conductive plugpenetrating the semiconductor substrate. The conductive plug isessential to favorably transfer charges from the photoelectricconversion elements on the first surface side of the semiconductorsubstrate to the second surface side of the semiconductor substrate,thereby enhancing characteristics such as conversion efficiency, andthere is still room for study of the configuration of the conductiveplug.

It is therefore desirable to provide a solid-state imaging device thatallows for enhancement of characteristics and an electronic apparatusincluding the solid-state imaging device.

A first solid-state imaging device according to an embodiment of thedisclosure includes: one or more photoelectric conversion elementsprovided on side of a first surface of a semiconductor substrate; athrough electrode coupled to the one or more photoelectric conversionelements, and provided between the first surface and a second surface ofthe semiconductor substrate; and an amplifier transistor and a floatingdiffusion provided on the second surface of the semiconductor substrate,in which the one or more photoelectric conversion elements are coupledto a gate of the amplifier transistor and the floating diffusion via thethrough electrode.

In the first solid-state imaging device according to the embodiment ofthe disclosure, charges generated in the photoelectric conversionelement on the side of the first surface of the semiconductor substrateare transferred to the side of the second surface of the semiconductorsubstrate via the through electrode to be accumulated in the floatingdiffusion. The amplifier transistor modulates an amount of chargesgenerated in the photoelectric conversion element into a voltage.

A second solid-imaging device according to an embodiment of thedisclosure includes: a photoelectric conversion element provided on sideof a first surface of a semiconductor substrate; a through electrodecoupled to the photoelectric conversion element, and provided betweenthe first surface and a second surface of the semiconductor substrate; aseparation groove provided between the through electrode and thesemiconductor substrate; and a dielectric layer embedded in theseparation groove, and having insulation properties.

In the second solid-state imaging device according to the embodiment ofthe disclosure, the through electrode and the semiconductor substrateare separated from each other by the separation groove and thedielectric layer. Thus, capacitance generated between the throughelectrode and the semiconductor substrate is reduced, thereby improvingcharacteristics such as conversion efficiency.

A third solid-state imaging device according to an embodiment of thedisclosure includes: a photoelectric conversion element provided on sideof a first surface of a semiconductor substrate; a through electrodecoupled to the photoelectric conversion element, and provided betweenthe first surface and a second surface of the semiconductor substrate; aseparation groove provided between the through electrode and thesemiconductor substrate; an outer dielectric layer covering an outerside surface of the separation groove; an inner dielectric layercovering an inner side surface of the separation groove; and a gapprovided between the outer dielectric layer and the inner dielectriclayer.

In the third solid-state imaging device according to the embodiment ofthe disclosure, the through electrode and the semiconductor substrateare separated from each other by the separation groove, the outerdielectric layer, the inner dielectric layer, and the gap. Thus,capacitance generated between the through electrode and thesemiconductor substrate is reduced, thereby improving characteristicssuch as conversion efficiency.

A first electronic apparatus according to an embodiment of thedisclosure is provided with an solid-state imaging device, and thesolid-state imaging device includes: one or more photoelectricconversion elements provided on side of a first surface of asemiconductor substrate; a through electrode coupled to the one or morephotoelectric conversion elements, and provided between the firstsurface and a second surface of the semiconductor substrate; and anamplifier transistor and a floating diffusion provided on the secondsurface of the semiconductor substrate, in which the one or morephotoelectric conversion elements are coupled to a gate of the amplifiertransistor and the floating diffusion via the through electrode.

A second electronic apparatus according to an embodiment of thedisclosure is provided with a solid-state imaging device, and thesolid-state imaging device includes: a photoelectric conversion elementprovided on side of a first surface of a semiconductor substrate; athrough electrode coupled to the photoelectric conversion element, andprovided between the first surface and a second surface of thesemiconductor substrate; a separation groove provided between thethrough electrode and the semiconductor substrate; and a dielectriclayer embedded in the separation groove, and having insulationproperties.

A third electronic apparatus according to an embodiment of thedisclosure is provided with a solid-state imaging device, and thesolid-state imaging device includes: a photoelectric conversion elementprovided on side of a first surface of a semiconductor substrate; athrough electrode coupled to the photoelectric conversion element, andprovided between the first surface and a second surface of thesemiconductor substrate; a separation groove provided between thethrough electrode and the semiconductor substrate; an outer dielectriclayer covering an outer side surface of the separation groove; an innerdielectric layer covering an inner side surface of the separationgroove; and a gap provided between the outer dielectric layer and theinner dielectric layer.

In the first to third electronic apparatuses according to the respectiveembodiments of the disclosure, imaging is performed by the first tothird solid-state imaging devices according to the respectiveembodiments of the disclosure.

According to the first solid-state imaging device according to theembodiment of the disclosure or the first electronic apparatus accordingto the embodiment of the disclosure, the photoelectric conversionelement is coupled to the gate of the amplifier transistor and thefloating diffusion via the through electrode. This makes it possible tofavorably transfer, to the side of the second surface of thesemiconductor substrate via the through electrode, charges generated inthe photoelectric conversion element on the side of the first surface ofthe semiconductor substrate, thereby enhancing characteristics.

According to the second solid-state imaging device according to theembodiment of the disclosure or the second electronic apparatusaccording to the embodiment of the disclosure, the through electrode andthe semiconductor substrate are separated from each other by theseparation groove and the dielectric layer. This makes it possible toreduce capacitance generated between the through electrode and thesemiconductor substrate, thereby enhancing characteristics such asconversion efficiency.

According to the third solid-state imaging device according to theembodiment of the disclosure or the third electronic apparatus accordingto the embodiment of the disclosure, the through electrode and thesemiconductor substrate are separated from each other by the separationgroove, the outer dielectric layer, the inner dielectric layer, and thegap. This makes it possible to reduce capacitance generated between thethrough electrode and the semiconductor substrate, thereby enhancingcharacteristics such as conversion efficiency.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view of a configuration of a solid-state imagingdevice according to a first embodiment of the disclosure.

FIG. 2 is a plan view of a configuration in which four solid-stateimaging devices illustrated in FIG. 1 are arranged.

FIG. 3 is a sectional view of a method of manufacturing the solid-stateimaging device illustrated in FIG. 1 in the order of procedure.

FIG. 4 is a sectional view of a process following FIG. 3.

FIG. 5 is a sectional view of a process following FIG. 4.

FIG. 6 is a sectional view of a process following FIG. 5.

FIG. 7 is a sectional view of a process following FIG. 6.

FIG. 8 is a sectional view of a process following FIG. 7.

FIG. 9 is a sectional view of a configuration of a solid-state imagingdevice according to a second embodiment of the disclosure.

FIG. 10 is a sectional view of a method of manufacturing the solid-stateimaging device illustrated in FIG. 9 in the order of procedure.

FIG. 11 is a sectional view of a process following FIG. 10.

FIG. 12 is a sectional view of a process following FIG. 11.

FIG. 13 is a sectional view of a process following FIG. 12.

FIG. 14 is a sectional view of a process following FIG. 13.

FIG. 15 is a sectional view of a process following FIG. 14.

FIG. 16 is a sectional view of a process following FIG. 15.

FIG. 17 is a sectional view of a process following FIG. 16.

FIG. 18 is a sectional view of a process following FIG. 17.

FIG. 19 is a sectional view of a configuration of a solid-state imagingdevice according to Modification Example 1.

FIG. 20 is a sectional view of a configuration of a solid-state imagingdevice according to a third embodiment of the disclosure.

FIG. 21 is a sectional view of a method of manufacturing the solid-stateimaging device illustrated in FIG. 20 in the order of procedure.

FIG. 22 is a sectional view of a process following FIG. 21.

FIG. 23 is a sectional view of a configuration of a solid-state imagingdevice according to a fourth embodiment of the disclosure.

FIG. 24 is a sectional view of a process of the method of manufacturingthe solid-state imaging device illustrated in FIG. 20.

FIG. 25 is a sectional view of a configuration of a solid-state imagingdevice according to Modification Example 2.

FIG. 26 is a functional block diagram of a solid-state imaging unit.

FIG. 27 is a functional block diagram of an electronic apparatusaccording to an application example.

MODE FOR CARRYING OUT THE INVENTION

In the following, some embodiments of the disclosure are described indetail with reference to the drawings. It is to be noted thatdescription is given in the following order.

1. First Embodiment (Solid-state imaging device; an example in which athrough electrode is made of a semiconductor and a separation groove onthe periphery of the through electrode has a gap)

2. Second Embodiment (Solid-state imaging device; an example in whichthe through electrode is made of a metal and the separation groove onthe periphery of the through electrode has a gap)

3. Modification Example 1 (An example in which a thermally-oxidized filmis provided on an outer side surface of the separation groove)

4. Third Embodiment (Solid-state imaging device; an example in which thethrough electrode is made of a semiconductor and the separation grooveon the periphery of the through electrode is filled with a dielectriclayer)

5. Fourth Embodiment (Solid-state imaging device; an example in whichthe through electrode is made of a metal and the separation groove onthe periphery of the through electrode is filled with the dielectriclayer)

6. Modification Example 2 (An example in which a thermally-oxidized filmis provided on the outer side surface of the separation groove)

7. Overall Configuration Example of Solid-state Imaging Unit

8. Application Example (An example of an electronic apparatus)

1. First Embodiment

FIG. 1 illustrates a sectional configuration of a solid-state imagingdevice 10 according to a first embodiment of the disclosure. Thesolid-state imaging device 10 may configure, for example, a pixelsection as an imaging pixel region in a solid-state imaging unit (to bedescribed later) such as a CMOS image sensor used in electronicapparatuses such as digital still cameras and video cameras.

The solid-state imaging device 10 may be of, for example, a so-calledlongitudinal spectroscopic type in which one photoelectric conversionelement 20 and two photodiodes PD1 and PD2 are stacked along a thicknessdirection of a semiconductor substrate 30. The photoelectric conversionelement 20 is provided on the side of a first surface (rear surface) 30Aof the semiconductor substrate 30. The photodiodes PD1 and PD2 are soprovided in the semiconductor substrate 30 as to be stacked along thethickness direction of the semiconductor substrate 30.

The photoelectric conversion element 20 and the photodiodes PD1 and PD2selectively detect light in wavelength ranges different from one anotherto perform photoelectric conversion on the thus-detected light. Morespecifically, the photoelectric conversion element 20 obtains a colorsignal of green (G). The photodiodes PD1 and PD2 respectively obtaincolor signals of blue (B) and red (R) by a difference in absorptioncoefficient. This allows the solid-state imaging device 10 to obtain aplurality of kinds of color signals in one pixel without using a colorfilter.

It is to be noted that, in the embodiment, description is given of acase where electrons of electron-hole pairs generated by photoelectricconversion are read out as signal charges (a case where an N-typesemiconductor region serves as a photoelectric conversion layer).Moreover, in the drawing, “+ (plus)” attached to “P” and “N” indicatesthat P-type or N-type impurity concentration is high, and “++” indicatesthat P-type or N-type impurity concentration is higher than impurityconcentration in “+”.

For example, floating diffusions (floating diffusion layers) FD1, FD2,and FD3, a vertical transistor (transfer transistor) Tr1, a transfertransistor Tr2, an amplifier transistor (modulator) AMP, a resettransistor RST, and a multi-layered wiring 40 may be provided on asecond surface (front surface) 30B of the semiconductor substrate 30.The multi-layered wiring 40 may have, for example, a configuration inwhich wiring layers 41, 42, and 43 are stacked in an insulating film 44.

It is to be noted that, in the drawings, the sides of the first surface30A and the second surface 30B of the semiconductor substrate 30 arerespectively referred to as light-entering side S1 and wiring layer sideS2.

The photoelectric conversion element 20 may have, for example, aconfiguration in which a lower transparent electrode 21, a photoelectricconversion film 22, and an upper transparent electrode 23 are stacked inthis order from the side of the first surface 30A of the semiconductorsubstrate 30. The transparent electrode 21 is separated for eachphotoelectric conversion element 20. The photoelectric conversion film22 and the transparent electrode 23 are provided as continuous layersshared by a plurality of photoelectric conversion elements 20. Forexample, a film 24 having a fixed charge, a dielectric layer 25 havinginsulation properties, and an interlayer insulating film 26 may beprovided between the first surface 30A of the semiconductor substrate 30and the transparent electrode 21. A protective film 27 is provided onthe transparent electrode 23. An optical member such as a planarizationfilm and an on-chip lens (none of which is illustrated) are providedabove the protective film 27.

A through electrode 50 is provided between the first surface 30A and thesecond surface 30B of the semiconductor substrate 30. The photoelectricconversion element 20 is coupled to a gate Gamp of the amplifiertransistor AMP and the floating diffusion FD3 via the through electrode50. This allows the solid-state imaging device 10 to favorably transfer,to the side of the second surface 30B of the semiconductor substrate 30via the through electrode 50, charges generated in the photoelectricconversion element 20 on the side of the first surface 30A of thesemiconductor substrate 30, thereby enhancing characteristics.

The through electrode 50 has a function as a connector between thephotoelectric conversion element 20 and the gate Gamp of the amplifiertransistor AMP and between the photoelectric conversion element 20 andthe floating diffusion FD3, as well as serves as a transmission path forcharges (here, electrons) generated in the photoelectric conversionelement 20. A lower end of the through electrode 50 may be coupled to,for example, a connection section 41A in the wiring layer 41 of themulti-layered wiring 40 via a lower first contact 51. The connectionsection 41A and the gate Gamp of the amplifier transistor AMP arecoupled to each other via a lower second contact 52. The connectionsection 41A and the floating diffusion FD3 are coupled to each other viaa lower third contact 53. An upper end of the through electrode 50 maybe coupled to, for example, the lower transparent electrode 21 via anupper contact 54.

FIG. 2 illustrates a planar configuration, viewed from the side of thesecond surface 30B of the semiconductor substrate 30, of an example ofthe solid-state imaging device 10 in which a plurality of (for example,four in FIG. 2) photoelectric conversion elements 20 are arranged in tworows by two columns. The through electrode 50 may be preferably providedfor each of the plurality of photoelectric conversion elements 20. Inother words, as the lower transparent electrode 21 of the photoelectricconversion element 20 is separated for each of the plurality ofphotoelectric conversion elements 20, the through electrode 50 is alsoprovided for each of the plurality of photoelectric conversion elements20.

As illustrated in FIGS. 1 and 2, a reset gate Grst of the resettransistor RST may be preferably disposed adjacent to the floatingdiffusion FD3. This makes it possible to reset charges accumulated inthe floating diffusion FD3 by the reset transistor RST.

It is to be noted that FIG. 2 illustrates only the amplifier transistorAMP and the reset transistor RST that process charges from thephotoelectric conversion element 20. The transfer transistors Tr1 andTr2 relating to the photodiodes PD1 and PD2 are not illustrated in FIG.2, but are appropriately disposed in an unoccupied region.

The through electrode 50 illustrated in FIG. 1 penetrates thesemiconductor substrate 30, as well as is separated from thesemiconductor substrate 30 by a separation groove 60. The throughelectrode 50 may be made of, for example, a same semiconductor as asemiconductor of the semiconductor substrate 30, for example silicon(Si), and may preferably have a resistance value reduced by doping withan N-type or P-type impurity (for example, P+ in FIG. 1). Moreover,high-concentration impurity regions (for example, P++ in FIG. 1) may bepreferably provided in the upper end and the lower end of the throughelectrode 50 to further reduce connection resistance with the uppercontact 54 and connection resistance with the lower first contact 51.

As illustrated in FIG. 1, an outer side surface 61, an inner sidesurface 62, and a bottom surface 63 of the separation groove 60 may becovered with the dielectric layer 25 having insulation properties. Thedielectric layer 25 may include, for example, an outer dielectric layer25A covering the outer side surface 61 of the separation groove 60, andan inner dielectric layer 25B covering the inner side surface 62 of theseparation groove 60. The outer dielectric layer 25A and the innerdielectric layer 25B may be preferably spaced with a gap 70 between. Inother words, the separation groove 60 may have a ring shape or acircular shape, and the gap 70 may have a ring shape or a circular shapethat is concentric with the separation groove 60. This makes it possibleto reduce capacitance generated between the through electrode 50 and thesemiconductor substrate 30, thereby enhancing conversion efficiency aswell as suppressing lag (persistence).

In the following, description is given of this. As described above, thethrough electrode 50 is made of a conductive material such as P+silicon, and the dielectric layer 25 is provided between the throughelectrode 50 and the semiconductor substrate 30. Since the throughelectrode 50 penetrates the semiconductor substrate 30, and is coupledto the amplifier transistor AMP and the floating diffusion FD3, it maybe desirable to reduce capacitance generated between the throughelectrode 50 and the semiconductor substrate 30. The following threemeasures are considered to reduce the capacitance. A first one of themeasures is to reduce area of a side wall of the through electrode 50. Asecond one of the measures is to increase a distance d between thethrough electrode 50 and the semiconductor substrate 30. A third one ofthe measures is to decrease a dielectric constant of an insulatorbetween the through electrode 50 and the semiconductor substrate 30.

Reducing the area of the side wall of the through electrode 50 as thefirst measure allows for reduction in a thickness of the semiconductorsubstrate 30 or reduction in a diameter of the through electrode 50.However, this may cause reduction in regions of the photodiodes PD1 andPD2, or an increase in difficulty level of a forming process of thesemiconductor substrate 30. Increasing the distance d between thethrough electrode 50 and the semiconductor substrate 30 as the secondmeasure is a relatively easy measure, but may lead to an increase indevice area.

In the embodiment, the gap 70 is provided in the separation groove 60 soas to take the foregoing third measure, i.e., to reduce the dielectricconstant of the insulator between the through electrode 50 and thesemiconductor substrate 30. Although gas such as hydrogen and nitrogenis present in the gap 70, for example, the dielectric constant of thegas may be lower than a dielectric constant of a dielectric of a solidsuch as a TEOS (Tetraethyl orthosilicate) film, and may be close to adielectric constant of vacuum. This makes it possible to remarkablyreduce capacitance between the through electrode 50 and thesemiconductor substrate 30.

It is to be noted that variation in size of the gap 70 may be preferablyas small as possible in the solid-state imaging device 10 or in a wafer,and may be preferably, for example, within plus or minus 10% or less. Areason for this is that the capacitance between the through electrode 50and the semiconductor substrate 30 is sensitive to the size of the gap70.

Moreover, in the solid-state imaging device 10, as illustrated in FIG.1, an impurity region (P+ in FIG. 1) of a same conductive type (N-typeor P-type) as a conductive type of the through electrode 50 may bepreferably provided on the outer side surface 61 of the separationgroove 60 in the semiconductor substrate 30. Further, the film 24 havingthe fixed charge may be preferably provided on the outer side surface61, the inner side surface 62, and the bottom surface 63 of theseparation groove 60, and the first surface 30A of the semiconductorsubstrate 30. More specifically, for example, a P-type impurity region(P+ in FIG. 1) as well as a film having a negative fixed charge as thefilm 24 having the fixed charge may be preferably provided on the outerside surface 61 of the separation groove 60 in the semiconductorsubstrate 30. This allows for reduction in dark current.

In the followings, description is given of this. In the longitudinalstereoscopic type solid-state imaging device 10, the through electrode50 and the separation groove 60 are provided for each of thephotoelectric conversion elements 20 while being in proximity to thephotodiodes PD1 and PD2 in the semiconductor substrate 30. Surfaces ofthe through electrode 50 and the separation groove 60 are unlike asurface of the semiconductor substrate 30, and are processed by dryetching or other processing, which generally have a large number ofdefect levels. This may increase dark currents and white spots of thephotodiodes PD1 and PD2 adjacent to the through electrode 50 and theseparation groove 60.

Here, to reduce the dark currents or the white spots, the P-typeimpurity region (P+ in FIG. 1) is provided on the outer side surface 61of the separation groove 60 in the semiconductor substrate 30, and thefilm having the negative fixed charge is further provided as the film 24having the fixed charge. An hole accumulation layer is formed on theouter side surface 61 of the separation groove 60 by an electric fieldinduced by the film 24 having the negative fixed charge. The holeaccumulation layer suppresses the generation of electrons from the outerside surface 61 of the separation groove 60. Moreover, even if charges(electrons) are generated from the outer side surface 61 of theseparation groove 60, the thus-generated electrons disappear in the holeaccumulation layer during diffusion of the electrons, and accordingly,the dark currents are reduced.

In the following, description is given of configurations and materialsof respective components.

The photoelectric conversion element 20 may be configured to performphotoelectric conversion on green light corresponding to a part or anentirety of a wavelength range of 495 nm to 570 nm both inclusive. Thetransparent electrodes 21 and 23 may each include, for example, aconductive film having light transparency, and may be made of, forexample, ITO (indium tin oxide). The photoelectric conversion film 22 isan organic film made of an organic photoelectric conversion materialthat photoelectrically converts light in a selective wavelength rangewhile allowing light in other wavelength ranges to pass therethrough.The photoelectric conversion film 22 may be made of, for example, anorganic photoelectric conversion material containing a rhodamine-baseddye, a merocyanine-based dye, quinacridone, or any other dye. It is tobe noted that the photoelectric conversion element 20 may be providedwith, in addition to the transparent electrodes 21 and 23 and thephotoelectric conversion film 22, other unillustrated layers such as abase layer, an electron block layer, and a buffer layer.

The film 24 having the fixed charge may be a film having a positivefixed charge or a film having a negative fixed charge. Non-limitingexamples of a material of the film having the negative fixed charge mayinclude hafnium oxide, aluminum oxide, zirconium oxide, tantalum oxide,and titanium oxide. Moreover, non-limiting examples of the materialother than the foregoing materials may include lanthanum oxide,praseodymium oxide, cerium oxide, neodymium oxide, promethium oxide,samarium oxide, europium oxide, gadolinium oxide, terbium oxide,dysprosium oxide, holmium oxide, thulium oxide, ytterbium oxide,lutetium oxide, yttrium oxide, an aluminum nitride film, a hafniumoxynitride film, and an aluminum oxynitride film.

The film 24 having the fixed charge may have a configuration in whichtwo or more kinds of films are stacked. For example, in the case of thefilm having the negative fixed charge, such a configuration makes itpossible to further enhance a function as the hole accumulation layer.

Examples of a material of the dielectric layer 25 may include, but notspecifically limited to, a silicon oxide film, TEOS, a silicon nitridefilm, and a silicon oxynitride film.

The interlayer insulating film 26 may be configured of, for example, asilicon oxide film. The protective film 27 may be configured of, forexample, a silicon nitride film.

The semiconductor substrate 30 may be configured of, for example, ann-type silicon (Si) substrate, and may have a p-well 31 in apredetermined region. The vertical transistor Tr1, the transfertransistor Tr2, the amplifier transistor AMP, the reset transistor RST,and other components that are described above are provided on the secondsurface 30B of the p-well 31. Moreover, a peripheral circuit (notillustrated) including, for example but not limited to, a logic circuitis provided on the periphery of the semiconductor substrate 30.

The photodiodes PD1 and PD2 each have PN junction in a predeterminedregion of the semiconductor substrate 30. The photodiodes PD1 and PD2allow for dispersion of light toward a longitudinal direction with useof a difference in wavelength of light absorbed according to alight-entering depth in a silicon substrate. The photodiode PD1selectively detects blue light to accumulate signal chargescorresponding to blue, and is disposed at a depth that allows blue lightto be photoelectically converted effectively. The photodiode PD2selectively detects red light to accumulate signal charges correspondingto red, and is disposed at a depth that allows red light to bephotoelectrically converted effectively. It is to be noted that blue (B)is a color corresponding to a wavelength range of, for example, 450 nmto 495 nm both inclusive, and red (R) is a color corresponding to awavelength range of, for example, 620 nm to 750 nm both inclusive. It isonly necessary for the respective photodiodes PD1 and PD2 to enable todetect light in a part or an entirety of the respective wavelengthranges.

The photodiode PD1 may include, for example, a P+ region serving as ahole accumulation layer and an N region serving as an electronaccumulation layer. The photodiode PD2 may include, for example, a P+region serving as a hole accumulation layer and an N region serving asan electron accumulation layer (i.e., may have a P-N-P stackingconfiguration). The N region of the photodiode PD1 is coupled to thevertical transistor Tr1. The P+ region of the photodiode PD1 is bentalong the vertical transistor Tr1 to be continuous with the P+ region ofthe photodiode PD2.

The vertical transistor Tr1 is a transfer transistor that transfers, tothe floating diffusion FD1, signal charges (electrons in the embodiment)corresponding to blue that are generated and accumulated in thephotodiode PD1. Since the photodiode PD1 is formed at a position deepfrom the second surface 30B of the semiconductor substrate 30, thetransfer transistor of the photodiode PD1 may be preferably configuredof the vertical transistor Tr1.

The transfer transistor Tr2 transfers, to the floating diffusion FD2,signal charges (electrons in the embodiment) corresponding to red thatare generated and accumulated in the photodiode PD2, and may beconfigured of, for example, a MOS transistor.

The amplifier transistor AMP is a modulator that modulates an amount ofcharges generated in the photoelectric conversion element 20 into avoltage, and may be configured of, for example, a MOS transistor.

The reset transistor RST is configured to reset charges transferred fromthe photoelectric conversion element 20 to the floating diffusion FD3,and may be configured of, for example, a MOS transistor.

The lower first to third contacts 51 to 53 and the upper contact 54 maybe made of, for example, a doped silicon material such as PDAS(Phosphorus Doped Amorphous Silicon), or a metal material such asaluminum, tungsten, titanium, cobalt, hafnium, and tantalum.

The solid-state imaging device 10 may be manufactured, for example, asfollows.

FIGS. 3 to 8 illustrate a method of manufacturing the solid-stateimaging device 10 in the order of procedure. First, as illustrated inFIG. 3, for example, the p-well 31 may be formed as a well of a firstconductive type in the semiconductor substrate 30, and the photodiodesPD1 and PD2 of a second conductive type (for example, N-type) may beformed in the P-well 31. A P+ region may be formed in proximity to thefirst surface 30A of the semiconductor substrate 30.

As illustrated in FIG. 3 as well, an impurity region (P+ region) may beso formed in a region where the through electrode 50 and the separationgroove 60 are to be formed as to penetrate from the first surface 30A tothe second surface 30B of the semiconductor substrate 30. Moreover,high-concentration impurity regions (P++ regions) may be formed inregions where the upper end and the lower end of the through electrode50 are to be formed.

As illustrated in FIG. 3 as well, N+ regions that are to serve as thefloating diffusions FD1 to FD3 may be formed along the second surface30B of the semiconductor substrate 30, and thereafter, the gateinsulating film 32, and a gate wiring 33 including gates of the verticaltransistor Tr1, the transfer transistor Tr2, the amplifier transistorAMP, and the reset transistor RST may be formed on the second surface30B of the semiconductor substrate 30. The vertical transistor Tr1, thetransfer transistor Tr2, the amplifier transistor AMP, and the resettransistor RST may be thus formed. Moreover, the lower first to thirdcontacts 51 to 53 and the multi-layered wiring 40 including the wiringlayers 41 to 43 including the connection section 41A, and the insulatingfilm 44 may be formed on the second surface 30B of the semiconductorsubstrate 30.

An example used as a base of the semiconductor substrate 30 may be a SOI(Silicon on Insulator) substrate in which the semiconductor substrate30, an embedded oxide film (not illustrated) and a holding substrate(not illustrated) are stacked. The embedded oxide film and the holdingsubstrate, which are not illustrated in FIG. 3, may be bonded to thefirst surface 30A of the semiconductor substrate 30. Annealing treatmentmay be performed after ion implantation.

Subsequently, as illustrated in FIG. 4, a support substrate (notillustrated) or any other semiconductor base may be bonded to the sideof the second surface 30B (the multi-layered wiring 40) of thesemiconductor substrate 30, and the semiconductor substrate 30 may bevertically reversed. Next, the semiconductor substrate 30 may beseparated from the embedded oxide film and the holding substrate of theSOI substrate to expose the first surface 30A of the semiconductorsubstrate 30. The foregoing processes may be carried out by techniquesused in a normal CMOS process such as ion implantation and CVD (ChemicalVapor Deposition).

Thereafter, as illustrated in FIG. 5, the semiconductor substrate 30 maybe processed from the side of the first surface 30A by, for example, dryetching to form the circular or ring-shaped separation groove 60.

As indicated by an arrow D60A in FIG. 5, a depth of the separationgroove 60 may be preferably deep enough to penetrate the semiconductorsubstrate 30 from the first surface 30A to the second surface 30B andreach the gate insulating film 32. Moreover, in order to further enhancean insulating effect on the bottom surface 63 of the separation groove60, as indicated by an arrow D60B in FIG. 5, the separation groove 60may preferably reach the insulating film 44 of the multi-layered wiring40 through the semiconductor substrate 30 and the gate insulating film32. FIG. 5 illustrates a case where the separation groove 60 penetratesthe semiconductor substrate 30 and the gate insulating film 32.

After forming the separation groove 60, as illustrated in FIG. 6, forexample, the film 24 having the negative fixed charge may be formed onthe outer side surface 61, the inner side surface 62, and the bottomsurface 63 of the separation groove 60, and the first surface 30A of thesemiconductor substrate 30. As the film 24 having the negative fixedcharge, two or more kinds of films may be stacked. This makes itpossible to further enhance the function as the hole accumulation layer.

After forming the film 24 having the negative fixed charge, thedielectric layer 25 including the outer dielectric layer 25A and theinner dielectric layer 25B may be formed as illustrated in FIG. 7. Atthis occasion, a film thickness and film formation conditions of thedielectric layer 25 may be appropriately adjusted to form the gap 70 inthe separation groove 60 between the outer dielectric layer 25A and theinner dielectric layer 25B.

After forming the dielectric layer 25 and the gap 70, as illustrated inFIG. 8, the interlayer insulating film 26 and the upper contact 54 maybe formed, and the upper contact 54 may be coupled to the upper end ofthe through electrode 50. Thereafter, the lower transparent electrode21, the photoelectric conversion film 22, the upper transparentelectrode 23, and the protective film 27 may be formed as illustrated inFIG. 1. Finally, the optical member such as a planarization film and theon-chip lens (not illustrated) may be provided. Thus, the solid-stateimaging device 10 illustrated in FIG. 10 is completed.

In the solid-state imaging device 10, when light enters thephotoelectric conversion element 20 via the on-chip lens (notillustrated), the light passes through the photoelectric conversionelement 20, and the photodiodes PD1 and PD2 in this order to berespectively photoelectrically converted into color light of green,blue, and red in the course of such passage. In the following,description is given of actions of obtaining signals of respectivecolors.

Obtaining of Green Signal by Photoelectric Conversion Element 20

Of light entering the photoelectric conversion element 20, green lightis first selectively detected (absorbed) and photoelectrically convertedby the photoelectric conversion element 20.

The photoelectric conversion element 20 is coupled to the gate Gamp ofthe amplifier transistor AMP and the floating diffusion FD3 via thethrough electrode 50. Electrons of electron-hole pairs generated in thephotoelectric conversion element 20 are therefore extracted from theside of the transparent electrode 21 to be transferred to the side ofthe second surface 30B of the semiconductor substrate 30 via the throughelectrode 50 and then accumulated in the floating diffusion FD3.Concurrently with this, an amount of charges generated in thephotoelectric conversion element 20 is modulated into a voltage by theamplifier transistor AMP.

Moreover, the reset gate Grst of the reset transistor RST is disposedadjacent to the floating diffusion FD3. The charges accumulated in thefloating diffusion FD3 are therefore reset by the reset transistor RST.

Here, the photoelectric conversion element 20 is coupled to not only theamplifier transistor AMP but also the floating diffusion FD3 via thethrough electrode 50, which makes it possible to easily reset thecharges accumulated in the floating diffusion FD3 by the resettransistor RST.

In a case where the through electrode 50 and the floating diffusion FD3are not coupled to each other, it is difficult to reset the chargesaccumulated in the floating diffusion FD3, and a large voltage istherefore applied to draw the charges to the side of the transparentelectrode 23. This may cause damage to the photoelectric conversion film22. Moreover, since a configuration that allows for resetting in a shorttime may cause an increase in dark time noise, thereby leading totrade-off, this configuration is difficult.

Obtaining Blue Signal and Red Signal by Photodiodes PD1 and PD2

Next, of the light having passed through the photoelectric conversionelement 20, blue light and red light are respectively absorbed andphotoelectrically converted by the photodiode PD1 and the photodiode PD2in order. In the photodiode PD1, electrons corresponding to the enteredblue light are accumulated in the N region of the photodiode PD1, andthe thus-accumulated electrons are transferred to the floating diffusionFD1 by the vertical transistor Tr1. Similarly, in the photodiode PD2,electrons corresponding to the entered red light are accumulated in theN region of the photodiode PD2, and the thus-accumulated electrons aretransferred to the floating diffusion FD2 by the transfer transistorTr2.

Thus, in the embodiment, since the photoelectric conversion element 20is coupled to the gate Gamp of the amplifier transistor AMP and thefloating diffusion FD3 via the through electrode 50, it is possible tofavorably transfer, to the side of the second surface 30B of thesemiconductor substrate 30 via the through electrode 50, chargesgenerated in the photoelectric conversion element 20 on the side of thefirst surface 30A of the semiconductor substrate 30, thereby enhancingcharacteristics.

Moreover, since the through electrode 50 and the semiconductor substrate30 are separated from each other by the separation groove 60, the outerdielectric layer 25A, the inner dielectric layer 25B, and the gap 70, itis possible to reduce capacitance generated between the throughelectrode 50 and the semiconductor substrate 30, thereby furtherimproving characteristics such as conversion efficiency.

Further, since the reset gate Grst of the reset transistor RST isdisposed adjacent to the floating diffusion FD3, it is possible toeasily reset the charges accumulated in the floating diffusion FD3 bythe reset transistor RST. This makes it possible to reduce damage to thephotoelectric conversion film 22, thereby improving reliability.Furthermore, this makes it possible to reset the charges in a short timewithout increasing dark time noise.

2. Second Embodiment

FIG. 9 illustrates a sectional configuration of a solid-state imagingdevice 10A according to a second embodiment of the disclosure. Thesolid-state imaging device 10A may include the through electrode 50 madeof a metal or a conductive material, but otherwise may have similarconfigurations, workings, and effects to those of the foregoing firstembodiment. Accordingly, description is given with similar componentsdenoted by similar reference numerals.

As with the first embodiment, the solid-state imaging device 10A may beof, for example, a so-called longitudinal spectroscopic type in whichone photoelectric conversion element 20 and two photodiodes PD1 and PD2are stacked along the thickness direction of the semiconductor substrate30. The photoelectric conversion element 20 is provided on the side ofthe first surface (rear surface) 30A of the semiconductor substrate 30.The photodiodes PD1 and PD2 are so provided in the semiconductorsubstrate 30 as to be stacked along the thickness direction of thesemiconductor substrate 30.

The photoelectric conversion element 20, the photodiodes PD1 and PD2,and the semiconductor substrate 30 may have similar configurations tothose of the first embodiment. The floating diffusions FD1 to FD3, thevertical transistor Tr1, the transfer transistor Tr2, the amplifiertransistor AMP, the reset transistor RST, and the multi-layered wiring40 may have similar configurations to those of the first embodiment.

As with the first embodiment, the through electrode 50 is providedbetween the first surface 30A and the second surface 30B of thesemiconductor substrate 30. The photoelectric conversion element 20 iscoupled to the gate Gamp of the amplifier transistor AMP and thefloating diffusion FD3 via the through electrode 50. As with the firstembodiment, this allows the solid-state imaging device 10 to favorablytransfer, to the side of the second surface 30B of the semiconductorsubstrate 30 via the through electrode 50, charges generated in thephotoelectric conversion element 20 on the side of the first surface 30Aof the semiconductor substrate 30, thereby enhancing characteristics.

As with the first embodiment, the floating diffusion FD3 is disposed inproximity to the through electrode 50. The reset gate Grst of the resettransistor RST may be preferably disposed adjacent to the floatingdiffusion FD3. This makes it possible to reset charges accumulated inthe floating diffusion FD3 by the reset transistor RST.

In the embodiment, the through electrode 50 may be made of the metal orthe conductive material as described above. This makes it possible tofurther reduce a resistance value of the through electrode 50 and tofurther reduce connection resistance between the through electrode 50and the lower first to third contacts 51 to 53 and between the throughelectrode 50 and the upper contact 54. This makes it possible to morefavorably transfer, to the side of the second surface 30B of thesemiconductor substrate 30 via the through electrode 50, chargesgenerated in the photoelectric conversion element 20 on the side of thefirst surface 30A of the semiconductor substrate 30, thereby furtherenhancing the characteristics. Non-limiting examples of the metal or theconductive material forming the through electrode 50 may includealuminum, tungsten, titanium, cobalt, hafnium, and tantalum.

As with the first embodiment, the separation groove 60 may be preferablyprovided between the through electrode 50 and the semiconductorsubstrate 30. The outer side surface 61, the inner side surface 62, andthe bottom surface 63 of the separation groove 60 may be preferablycovered with the dielectric layer 25 having insulation properties. Theouter dielectric layer 25A covering the outer side surface 61 of theseparation groove and the inner dielectric layer 25B covering the innerside surface 62 of the separation groove 60 may be preferably spacedwith the gap 70 between. This makes it possible to reduce capacitancegenerated between the through electrode 50 and the semiconductorsubstrate 30, thereby enhancing conversion efficiency as well assuppressing lag (persistence).

Moreover, in the solid-state imaging device 10A, as with the firstembodiment, an impurity region (P+ in FIG. 9) may be preferably providedon the outer side surface 61 of the separation groove 60 in thesemiconductor substrate 30. Further, the film 24 having the fixed chargemay be preferably provided on the outer side surface 61, the inner sidesurface 62, and the bottom surface 63 of the separation groove 60, andthe first surface 30A of the semiconductor substrate 30. Morespecifically, for example, a P-type impurity region (P+ in FIG. 9) aswell as a film having a negative fixed charge as the film 24 having thefixed charge may be preferably provided on the outer side surface 61 ofthe separation groove 60 in the semiconductor substrate 30. This allowsfor reduction in dark current.

As with the first embodiment, the film 24 having the fixed charge may bea film having a positive fixed charge or a film having a negative fixedcharge. Non-limiting examples of a material of the film having thenegative fixed charge may include hafnium oxide, aluminum oxide,zirconium oxide, tantalum oxide, and titanium oxide. Moreover,non-limiting examples of the material other than the foregoing materialsmay include lanthanum oxide, praseodymium oxide, cerium oxide, neodymiumoxide, promethium oxide, samarium oxide, europium oxide, gadoliniumoxide, terbium oxide, dysprosium oxide, holmium oxide, thulium oxide,ytterbium oxide, lutetium oxide, yttrium oxide, an aluminum nitridefilm, a hafnium oxynitride film, and an aluminum oxynitride film.

As with the first embodiment, the film 24 having the fixed charge mayhave a configuration in with two or more kinds of films are stacked. Forexample, in the case of the film having the negative fixed charge, sucha configuration makes it possible to further enhance a function as thehole accumulation layer.

As with the first embodiment, examples of a material of the dielectriclayer 25 may include, but not specifically limited to, a silicon oxidefilm, TEOS, a silicon nitride film, and a silicon oxynitride film.

As with the first embodiment, the lower first to third contacts 51 to 53and the upper contact 54 may be made of, for example, a doped siliconmaterial such as PDAS, or a metal material such as aluminum, tungsten,titanium, cobalt, hafnium, and tantalum.

The solid-state imaging device 10A may be manufactured, for example, asfollows.

FIGS. 10 to 18 illustrate a method of manufacturing the solid-stateimaging device 10A in the order of procedure. First, as with the firstembodiment, through the process illustrated in FIG. 3, for example, thep-well 31 may be formed as a well of the first conductive type in thesemiconductor substrate 30, and the photodiodes PD1 and PD2 of thesecond conductive type (for example, N-type) may be formed in the p-well31. The P+ region may be formed in proximity to the first surface 30A ofthe semiconductor substrate 30.

Moreover, as with the first embodiment, through the process illustratedin FIG. 3 as well, an impurity region (P+ region) may be so formed in aregion where the through electrode 50 and the separation groove 60 areto be formed as to penetrate from the first surface 30A to the secondsurface 30B of the semiconductor substrate 30. It is to be noted that,in the embodiment, since the through electrode 50 is made of the metalor the conductive material, high-concentration impurity regions (P++regions) in the upper end and the lower end of the through electrode 50are unnecessary.

As with the first embodiment, through the process illustrated in FIG. 3as well, N+ regions that are to serve as the floating diffusions FD1 toFD3 may be formed on the second surface 30B of the semiconductorsubstrate 30, and thereafter, the gate insulating film 32, and the gatewiring 33 including gates of the vertical transistor Tr1, the transfertransistor Tr2, the amplifier transistor AMP, and the reset transistorRST may be formed on the second surface 30B of the semiconductorsubstrate 30. The vertical transistor Tr1, the transfer transistor Tr2,the amplifier transistor AMP, and the reset transistor RST may be thusformed. Moreover, the lower first to third contacts 51 to 53 and themulti-layered wiring 40 including the wiring layers 41 to 43 includingthe connection section 41A, and the insulating film 44 may be formed onthe second surface 30B of the semiconductor substrate 30.

As with the first embodiment, an example used as the base of thesemiconductor substrate 30 may be the SOI substrate. Annealing treatmentmay be performed after ion implantation.

Subsequently, as illustrated in FIG. 10, a support substrate (notillustrated) or any other semiconductor base may be bonded to the sideof the second surface 30B (the multi-layered wiring 40) of thesemiconductor substrate 30, and the semiconductor substrate 30 may bevertically reversed. Next, the semiconductor substrate 30 may beseparated from the embedded oxide film and the holding substrate of theSOI substrate to expose the first surface 30A of the semiconductorsubstrate 30. The foregoing processes may be carried out by techniquesused in a normal CMOS process such as ion implantation and CVD (ChemicalVapor Deposition).

Thereafter, as illustrated in FIG. 11, the semiconductor substrate 30may be processed from the side of the first surface 30A by, for example,dry etching to form the circular or ring-shaped separation groove 60that penetrates the semiconductor substrate 30.

After forming the separation groove 60, as illustrated in FIG. 12, aninsulating film 80 may be formed on the outer side surface 61 and thebottom surface 63 of the separation groove 60, and the first surface 30Aof the semiconductor substrate 30. As a material of the insulating film80, TEOS, or a SiO film, a SiN film, or any other film formed by an ALDmethod may be used.

Subsequently, as illustrated in FIG. 13, the insulating film 80 may berecessed by dry etching or any other method.

Thereafter, as illustrated in FIG. 14, a metal material film 50A may beembedded in the separation groove 60.

After the metal material film 50A is embedded, as illustrated in FIG.15, the metal material film 50A may be recessed or planarized by dryetching or CMP (Chemical Mechanical Polishing) to form the throughelectrode 50. At this occasion, a thickness of the insulating film 80may be reduced in proximity to an entrance of the separation groove 60by etching back; therefore, the metal material film 50A may bepreferably recessed to a depth where the thickness of the insulatingfilm 80 is secured. This makes it possible to prevent a short circuitbetween the through electrode 50 and the semiconductor substrate 30.

After forming the through electrode 50, as illustrated in FIG. 16, theinsulating film 80 may be removed.

After removing the insulating film 80, as illustrated in FIG. 17, thefilm 24 having, for example, the negative fixed charge may be formed onthe outer side surface 61, the inner side surface 62, and the bottomsurface 63 of the separation groove 60, and the first surface 30A of thesemiconductor substrate 30. As the film 24 having the negative fixedcharge, two or more kinds of films may be stacked. This makes itpossible to further enhance the function as the hole accumulation layer.

After forming the film 24 having the negative fixed charge, asillustrated in FIG. 17 as well, the dielectric layer 25 may be formed.At this occasion, the film thickness and film formation conditions ofthe dielectric layer 25 may be appropriately adjusted to form the gap 70in the separation groove 60. It is to be noted that a surface of thedielectric layer 25 may be planarized by CMP or any other method.

After forming the dielectric layer 25 and the gap 70, as illustrated inFIG. 18, the interlayer insulating film 26 and the upper contact 54 maybe formed, and the upper contact 54 may be coupled to the upper end ofthe through electrode 50. Thereafter, the lower transparent electrode21, the photoelectric conversion film 22, and the upper transparentelectrode 23, and the protective film 27 may be formed as illustrated inFIG. 9. Finally, the optical member such as a planarization film and theon-chip lens (not illustrated) may be provided. Thus, the solid-stateimaging device 10A illustrated in FIG. 9 is completed.

In the solid-state imaging device 10A, when light enters thephotoelectric conversion element 20 via the on-chip lens (notillustrated), the light passes through the photoelectric conversionelement 20, and the photodiodes PD1 and PD2 in this order to berespectively photoelectrically converted into color light of green,blue, and red in the course of such passage, and signals of respectivecolors are thus obtained in a similar manner to that of the firstembodiment.

Since the through electrode 50 is made of the metal or the conductivematerial here, it is possible to reduce the resistance value of thethrough electrode 50, thereby further improving characteristics.

Thus, in the embodiment, the through electrode 50 is made of the metalor the conductive material, which makes it possible to reduce theresistance value of the through electrode 50, thereby further enhancingcharacteristics.

3. Modification Example 1

FIG. 19 illustrates a sectional configuration of a solid-state imagingdevice 10B according to Modification Example 1. The solid-state imagingdevice 10B may include a thermal oxidized film 34 between the dielectriclayer 25 and the through electrode 50 and between the dielectric layer25 and the semiconductor substrate 30. The thermally oxidized film 34may be made of, for example but not limited to, a silicon oxide film inwhich silicon in the semiconductor substrate 30 is thermally oxidized,silicon oxynitride, or a high-dielectric insulating film. Otherwise, thesolid-state imaging device 10B may have similar configurations,workings, and effects to those of the foregoing first embodiment.Moreover, the solid-state imaging device 10B may be manufactured in asimilar manner to that of the first embodiment, except that thethermally oxidized film 34 is provided on the outer side surface 61 andthe inner side surface 62 of the separation groove 60.

4. Third Embodiment

FIG. 20 illustrates a sectional configuration of a solid-state imagingdevice 10C according to a third embodiment of the disclosure. Thesolid-state imaging device 10C is configured to reduce capacitancegenerated between the through electrode 50 and the semiconductorsubstrate 30 by filling the separation groove 60 with the dielectriclayer 25 having insulation properties, thereby further improvingcharacteristics such as conversion efficiency. Otherwise, thesolid-state imaging device 10C may have similar configurations,workings, and effects to those of the foregoing first embodiment.

The solid-state imaging device 10C may be manufactured, for example, asfollows.

FIGS. 21 and 22 illustrate a method of manufacturing the solid-stateimaging device 10C in the order of procedure. It is to be noted thatsame processes as those of the first embodiment are described withreference to FIGS. 3 to 6.

First, as with the first embodiment, through the process illustrated inFIG. 3, for example, the p-well 31 may be formed as a well of the firstconductive type in the semiconductor substrate 30, and the photodiodesPD1 and PD2 of the second conductive type (for example, N-type) may beformed in the p-well 31. The P+ region may be formed in proximity to thefirst surface 30A of the semiconductor substrate 30.

Moreover, as with the first embodiment, through the process illustratedin FIG. 3 as well, an impurity region (P+ region) may be so formed in aregion where the through electrode 50 and the separation groove 60 areto be formed as to penetrate from the first surface 30A to the secondsurface 30B of the semiconductor substrate 30. Moreover,high-concentration impurity regions (P++ regions) may be formed inregions where the upper end and the lower end of the through electrode50 are to be formed.

As with the first embodiment, through the process illustrated in FIG. 3as well, the N+regions that are to serve as the floating diffusions FD1to FD3 may be formed along the second surface 30B of the semiconductorsubstrate 30, and thereafter, the gate insulating film 32, and the gatewiring 33 including the gates of the vertical transistor Tr1, thetransfer transistor Tr2, the amplifier transistor AMP, and the resettransistor RST may be formed on the second surface 30B of thesemiconductor substrate 30. The vertical transistor Tr1, the transfertransistor Tr2, the amplifier transistor AMP, and the reset transistorRST may be thus formed. Moreover, the lower first to third contacts 51to 53 and the multi-layered wiring 40 including the wiring layers 41 to43 including the connection section 41A, and the insulating film 44 maybe formed on the second surface 30B of the semiconductor substrate 30.

As with the first embodiment, an example used as the base of thesemiconductor substrate 30 may be the SOI substrate. Annealing treatmentmay be performed after ion implantation.

Subsequently, as with the first embodiment, through the processillustrated in FIG. 4, a support substrate (not illustrated) or anyother semiconductor base may be bonded to the side of the second surface30B (the multi-layered wiring 40) of the semiconductor substrate 30, andthe semiconductor substrate 30 may be vertically reversed. Next, thesemiconductor substrate 30 may be separated from the embedded oxide filmand the holding substrate of the SOI substrate to expose the firstsurface 30A of the semiconductor substrate 30. The foregoing processesmay be carried out by techniques used in a normal CMOS process such asion implantation and CVD.

Thereafter, as with the first embodiment, through the processillustrated in FIG. 5, the semiconductor substrate 30 may be processedfrom the side of the first surface 30A by, for example, dry etching toform the circular or ring-shaped separation groove 60.

After forming the separation groove 60, as with the first embodiment,through the process illustrated in FIG. 6, for example, the film 24having the negative fixed charge may be formed on the outer side surface61, the inner side surface 62, and the bottom surface 63 of theseparation groove 60, and the first surface 30A of the semiconductorsubstrate 30. As the film 24 having the negative fixed charge, two ormore kinds of films may be stacked. This makes it possible to furtherenhance the function as the hole accumulation layer.

After forming the film 24 having the negative fixed charge, asillustrated in FIG. 21, the separation groove 60 may be filled with thedielectric layer 25.

After forming the dielectric layer 25, as illustrated in FIG. 22, theinterlayer insulating film 26 and the upper contact 54 may be formed,and the upper contact 54 may be coupled to the upper end of the throughelectrode 50. Thereafter, the lower transparent electrode 21, thephotoelectric conversion film 22, the upper transparent electrode 23,and the protective film 27 may be formed as illustrated in FIG. 20.Finally, the optical member such as a planarization film and the on-chiplens (not illustrated) may be provided. Thus, the solid-state imagingdevice 10C illustrated in FIG. 20 is completed.

5. Fourth Embodiment

FIG. 23 illustrates a sectional configuration of a solid-state imagingdevice 10D according to a fourth embodiment of the disclosure. Thesolid-state imaging device 10D is configured to reduce capacitancegenerated between the through electrode 50 and the semiconductorsubstrate 30 by filling the separation groove 60 with the dielectriclayer 25 having insulation properties, thereby further improvingcharacteristics such as conversion efficiency. Otherwise, thesolid-state imaging device 10D may have similar configurations,workings, and effects to those of the foregoing second embodiment.

As illustrated in FIG. 24, the solid-state imaging device 10D may bemanufactured in a similar manner to that of the second embodiment,except that the separation groove 60 is filled with the dielectric layer25.

6. Modification Example 2

FIG. 25 illustrates a sectional configuration of a solid-state imagingdevice 10E according to Modification Example 2. The solid-state imagingdevice 10E may include the thermally oxidized film 34, which is similarto that of Modification Example 1, between the dielectric layer 25 andthe through electrode 50 and between the dielectric layer 25 and thesemiconductor substrate 30. As with Modification Example 1, thethermally oxidized film 34 may be made of, for example but not limitedto, a silicon oxide film in which silicon in the semiconductor substrate30 is thermally oxidized, silicon oxynitride, or a high-dielectricinsulating film. Otherwise, the solid-state imaging device 10E may havesimilar configurations, workings, and effects to those of the foregoingthird embodiment. Moreover, the solid-state imaging device 10E may bemanufactured in a similar manner to that of the third embodiment, exceptthat the thermally oxidized film 34 is provided on the outer sidesurface 61 and the inner side surface 62 of the separation groove 60.

7. Overall Configuration of Solid-state Imaging Unit

FIG. 26 illustrates an overall configuration of a solid-state imagingunit including, as a pixel section 110, one of the solid-state imagingdevices 10 and 10A to 10E described in the foregoing embodiments. Thesolid-state imaging unit 1 may be, for example, a CMOS image sensor, andmay include, for example, the pixel section 110 as an imaging pixelregion, as well as a circuit section 130. The circuit section 130 mayinclude, for example, a row scanner 131, a horizontal selector 133, acolumn scanner 134, and a system controller 132. The circuit section 130may be provided in a peripheral region around the pixel section 110.Alternatively, the circuit section 130 may be stacked above or below thepixel section 110 (that is, in a region facing the pixel section 110).

The pixel section 110 may include, for example, a plurality of pixelsPXL that are arranged in a two-dimensional array. The pixels PXL may bewired with pixel drive lines Lread (specifically, row selector lines andreset control lines) for each pixel row, and may be wired with verticalsignal lines Lsig for each pixel column. The pixel drive lines Lread areadapted to transmit drive signals to read signals from the pixels. Oneends of the pixel drive lines Lread may be coupled to output terminalsthat correspond to their respective rows of the row scanner 131.

The row scanner 131 may include, for example, a shift register and anaddress decoder, and may serve as a pixel drive section that drives thepixels PXL of the pixel section 110, for example, in a row unit. Signalsmay be outputted from the pixels PXL of a pixel row selected and scannedby the row scanner 131; and the signals thus outputted may be suppliedto the horizontal selector 133 through the respective vertical signallines Lsig. The horizontal selector 133 may include, for example, anamplifier and horizontal selector switches that are provided for each ofthe vertical signal lines Lsig.

The column scanner 134 may include, for example, a shift register and anaddress decoder, and is adapted to scan and sequentially drive thehorizontal selector switches of the horizontal selector 133. Suchselective scanning by the column scanner 134 allows the signalstransmitted from the pixels PXL through the respective vertical signallines Lsig to be sequentially transmitted to a horizontal signal line135 and to be outputted through the horizontal signal line 135.

The system controller 132 is adapted to receive, for example, a clocksupplied from the outside, data on instructions of operation modes, andto output data such as internal information of the solid-state imagingunit 1. Furthermore, the system controller 132 may include a timinggenerator that generates various timing signals, and is adapted toperform drive control of the row scanner 131, the horizontal selector133, the column scanner 134, and other parts, based on the varioustiming signals generated by the timing generator.

8. Application Example

The solid-state imaging unit according to the forgoing descriptionincluding the above-described example embodiments may be applied tovarious electronic apparatuses having imaging functions. Examples mayinclude camera systems such as digital still cameras and video cameras,and mobile phones having imaging functions. FIG. 27 illustrates, forpurpose of an example, an overall configuration of an electronicapparatus 2 (e.g., a camera). The electronic apparatus 2 may be a videocamera configured to capture still images and moving pictures, and mayinclude the solid-state imaging unit 1, an optical system (an imaginglens) 310, a shutter device 311, a drive section 313 (that includes theabove-mentioned circuit section 130), a signal processing section 312, auser interface 314, and a monitor 315. The drive section 313 is adaptedto drive the solid-state imaging unit 1 and the shutter device 311.

The optical system 310 is adapted to guide image light (entering light)from an object toward the pixel section 110 of the solid-state imagingunit 1. The optical system 310 may include a plurality of opticallenses. The shutter device 311 is adapted to control a light-irradiatingperiod and a light-shielding period of the solid-state imaging unit 1.The drive section 313 is adapted to control transfer operation of thesolid-state imaging unit 1 and shutter operation of the shutter device311. The signal processing section 312 is adapted to perform varioussignal processing on signals outputted from the solid-state imaging unit1. A picture signal Dout after the signal processing may be outputted tothe monitor 315. Alternatively, the picture signal Dout may be stored ina storage medium such as a memory. The user interface 314 allows fordesignation of scenes to be photographed (e.g., designation of dynamicranges and designation of wavelengths (such as terahertz, visible light,infrared, ultraviolet, and X ray)). Such designation (i.e., an inputsignal from the user interface 314) may be sent to the drive section313; based on the designation, desired imaging may be carried out in thesolid-state imaging unit 1.

Although description has been made by giving the example embodiments asmentioned above, the contents of the disclosure are not limited to theabove-mentioned example embodiments, etc. and may be modified in avariety of ways. For example, the pixel circuit of the solid-stateimaging device 10 may have a three-transistor configuration includingthree transistors in total, including a transfer transistor, anamplifier transistor, and a reset transistor, or four-transistorconfiguration further including a selection transistor in addition tothe three transistors.

Moreover, for example, in the forgoing example embodiments, descriptionhas been given on a case where the solid-state imaging unit is appliedto a camera as an example; however, the solid-state imaging unit may bealso applied to general electronic apparatuses that image light(electromagnetic waves), such as endoscopes, vision chips (artificialretinas), and biosensors.

Moreover, in the forgoing example embodiments, description has beengiven on the configuration of the backside illuminated type solid-stateimaging device 10; however, the contents of the present disclosure areapplicable also to a front illuminated type solid-state imaging device.

For example, in the solid-state imaging device 10 and the solid-stateimaging unit 1 according to the forgoing example embodiments, it is notnecessary to include all the components, and another component or othercomponents may be further provided.

It is to be noted that the contents of the technology may have thefollowing configurations.

(1) A solid-state imaging device including:

one or more photoelectric conversion elements provided on side of afirst surface of a semiconductor substrate;

a through electrode coupled to the one or more photoelectric conversionelements, and provided between the first surface and a second surface ofthe semiconductor substrate; and

an amplifier transistor and a floating diffusion provided on the secondsurface of the semiconductor substrate,

in which the one or more photoelectric conversion elements are coupledto a gate of the amplifier transistor and the floating diffusion via thethrough electrode.

(2) The solid-state imaging device according to (1), further including areset transistor provided on the second surface of the semiconductorsubstrate, the reset transistor including a reset gate,

in which the reset gate is disposed adjacent to the floating diffusion.

(3) The solid-state imaging device according to (1) or (2), in which

the one or more photoelectric conversion elements include a plurality ofphotoelectric conversion elements, and

the through electrode is provided for each of the plurality ofphotoelectric conversion elements.

(4) The solid-state imaging device according to any one of (1) to (3),in which the through electrode penetrates the semiconductor substrateand is separated from the semiconductor substrate by a separationgroove.

(5) The solid-state imaging device according to (4), in which

the through electrode is made of a semiconductor doped with an N-type orP-type impurity, and

an impurity region of a same conductive type as a conductive type of thethrough electrode is provided on an outer side surface of the separationgroove in the semiconductor substrate.

(6) The solid-state imaging device according to (4), in which thethrough electrode is made of a metal or a conductive material.

(7) The solid-state imaging device according to any one of (4) to (6),in which the separation groove is filled with a dielectric layer havinginsulation properties.

(8) The solid-state imaging device according to any one of (4) to (6),in which

an outer side surface of the separation groove is covered with an outerdielectric layer,

an inner side surface of the separation groove is covered with an innerdielectric layer, and

the outer dielectric layer and the inner dielectric layer are spacedwith a gap between.

(9) The solid-state imaging device according to any one of (4) to (8),in which a film having a fixed charge is provided on an outer sidesurface, an inner side surface, and a bottom surface of the separationgroove, and the first surface of the semiconductor substrate.

(10) The solid-state imaging device according to any one of (1) to (9),further including one or more photodiodes provided in the semiconductorsubstrate.

(11) A solid-state imaging device including:

a photoelectric conversion element provided on side of a first surfaceof a semiconductor substrate;

a through electrode coupled to the photoelectric conversion element, andprovided between the first surface and a second surface of thesemiconductor substrate;

a separation groove provided between the through electrode and thesemiconductor substrate; and

a dielectric layer embedded in the separation groove, and havinginsulation properties.

(12) A solid-state imaging device including:

a photoelectric conversion element provided on side of a first surfaceof a semiconductor substrate;

a through electrode coupled to the photoelectric conversion element, andprovided between the first surface and a second surface of thesemiconductor substrate;

a separation groove provided between the through electrode and thesemiconductor substrate;

an outer dielectric layer covering an outer side surface of theseparation groove;

an inner dielectric layer covering an inner side surface of theseparation groove; and

a gap provided between the outer dielectric layer and the innerdielectric layer.

(13) An electronic apparatus provided with a solid-state imaging device,the solid-state imaging device including:

one or more photoelectric conversion elements provided on side of afirst surface of a semiconductor substrate;

a through electrode coupled to the one or more photoelectric conversionelements, and provided between the first surface and a second surface ofthe semiconductor substrate; and

an amplifier transistor and a floating diffusion provided on the secondsurface of the semiconductor substrate,

in which the one or more photoelectric conversion elements are coupledto a gate of the amplifier transistor and the floating diffusion via thethrough electrode.

(14) An electronic apparatus provided with a solid-state imaging device,the solid-state imaging device including:

a photoelectric conversion element provided on side of a first surfaceof a semiconductor substrate;

a through electrode coupled to the photoelectric conversion element, andprovided between the first surface and a second surface of thesemiconductor substrate;

a separation groove provided between the through electrode and thesemiconductor substrate; and

a dielectric layer embedded in the separation groove, and havinginsulation properties.

(15) An electronic apparatus provided with a solid-state imaging device,the solid-state imaging device including:

a photoelectric conversion element provided on side of a first surfaceof a semiconductor substrate;

a through electrode coupled to the photoelectric conversion element, andprovided between the first surface and a second surface of thesemiconductor substrate;

a separation groove provided between the through electrode and thesemiconductor substrate;

an outer dielectric layer covering an outer side surface of theseparation groove;

an inner dielectric layer covering an inner side surface of theseparation groove; and

a gap provided between the outer dielectric layer and the innerdielectric layer.

This application claims the benefit of Japanese Priority PatentApplication JP 2013-169553 filed on Aug. 19, 2013, the entire contentsof which are incorporated herein by reference.

It should be understood by those skilled in the art that variousmodifications, combinations, sub-combinations, and alterations may occurdepending on design requirements and other factors insofar as they arewithin the scope of the appended claims or the equivalents thereof.

What is claimed is:
 1. A solid-state imaging device, comprising: one ormore photoelectric conversion elements provided on a side of a firstsurface of a semiconductor substrate; a through electrode coupled to theone or more photoelectric conversion elements, and provided between thefirst surface and a second surface of the semiconductor substrate; and adielectric layer provided between the through electrode and thesemiconductor substrate, wherein the through electrode is made of aconductive material such as a silicon material.
 2. The solid-stateimaging device according to claim 1, further comprising an amplifiertransistor and a floating diffusion provided on the second surface ofthe semiconductor substrate.
 3. The solid-state imaging device accordingto claim 2, wherein the one or more photoelectric conversion elementsare coupled to a gate of the amplifier transistor and the floatingdiffusion via the through electrode, and wherein the through electrodepenetrates the semiconductor substrate and is separated from thesemiconductor substrate by a separation groove.
 4. The solid-stateimaging device according to claim 1, wherein the dielectric layer ismade of silicon oxide.
 5. The solid-state imaging device according toclaim 1, wherein the one or more photoelectric conversion elements arecoupled to a gate of the amplifier transistor and the floating diffusionvia the through electrode.
 6. The solid-state imaging device accordingto claim 1, wherein the one or more photoelectric conversion elementscomprise a plurality of photoelectric conversion elements, and thethrough electrode is provided for each of the plurality of photoelectricconversion elements.
 7. The solid-state imaging device according toclaim 1, further comprising one or more photodiodes provided in thesemiconductor substrate.
 8. The solid-state imaging device according toclaim 1, wherein the through electrode penetrates the semiconductorsubstrate and is separated by the semiconductor substrate by aseparation groove.
 9. The solid-state imaging device according to claim8, wherein the separation groove is filled with a dielectric layerhaving insulation properties.
 10. An electronic apparatus provided witha solid-state imaging device, the solid-state imaging device comprising:one or more photoelectric conversion elements provided on a side of afirst surface of a semiconductor substrate; a through electrode coupledto the one or more photoelectric conversion elements, and providedbetween the first surface and a second surface of the semiconductorsubstrate; and a dielectric layer provided between the through electrodeand the semiconductor substrate, wherein the through electrode is madeof a conductive material such as a silicon material.
 11. The electronicapparatus according to claim 10, further comprising an amplifiertransistor and a floating diffusion provided on the second surface ofthe semiconductor substrate.
 12. The electronic apparatus according toclaim 11, wherein the one or more photoelectric conversion elements arecoupled to a gate of the amplifier transistor and the floating diffusionvia the through electrode, and wherein the through electrode penetratesthe semiconductor substrate and is separated from the semiconductorsubstrate by a separation groove.
 13. The electronic apparatus accordingto claim 10, wherein the dielectric layer is made of silicon oxide. 14.The electronic apparatus according to claim 10, wherein the one or morephotoelectric conversion elements are coupled to a gate of the amplifiertransistor and the floating diffusion via the through electrode.
 15. Theelectronic apparatus according to claim 10, wherein the one or morephotoelectric conversion elements comprise a plurality of photoelectricconversion elements, and the through electrode is provided for each ofthe plurality of photoelectric conversion elements.
 16. The electronicapparatus according to claim 10, further comprising one or morephotodiodes provided in the semiconductor substrate.
 17. The electronicapparatus according to claim 10, wherein the through electrodepenetrates the semiconductor substrate and is separated by thesemiconductor substrate by a separation groove.
 18. The electronicapparatus according to claim 17, wherein the separation groove is filledwith a dielectric layer having insulation properties.
 19. A solid-stateimaging device, comprising: one or more photoelectric conversionelements provided on a side of a first surface of a semiconductorsubstrate; a through electrode coupled to the one or more photoelectricconversion elements, and provided between the first surface and a secondsurface of the semiconductor substrate; and a dielectric layer providedbetween the through electrode and the semiconductor substrate, whereinthe through electrode is made of a conductive material such as a siliconmaterial and wherein the through electrode penetrates the semiconductorsubstrate and is separated from the semiconductor substrate by aseparation groove.
 20. The solid-state imaging device according to claim19, wherein the separation groove is filled with dielectric layer havinginsulation properties.